Study of Enhanced Mass Detection Using Cantilever Beam

J. Gayathri, B. Rajesh Kumar

Abstract: Cantilever, one of the most common forms of MEMS. Using Cantilever one can make highly sensitive sensor. Moreover to design a mass based sensor sensitivity plays a vital role. In this paper, micro-cantilever was designed whose sensitivity was enhanced. The strengthened sensor is now used to detect minimal changes in mass. Study was carried out in experimental and analytical analysis. Experimental analysis was executed using COMSOL MULTIPHYSICS (simulation software). This paper demonstrates the use of Stoney?s formula for analyzing the analytical variations of micro-cantilever sensor. Obtained analytical and experimental outcomes of the sensor in both static and dynamic modes were compared.

Keywords: Cantilever, COMSOL, Stoney?s Formula, Sensitivity