Sensitivity Analysis of MEMS-based four Beam Vector Hydrophone

Nidhi Singh, R P Singh, Devendra Verma, P S Rao

Abstract: MEMS Vector Hydrophone is a recent advancement in the field of underwater acoustic sensors. The major incentive provided by this hydrophone is that it provides the direction of the incoming source signal. These hydrophones are miniaturized upto the scale of micrometers and hence lightweight which makes them useful for deployment in AUVs and ROVs. This way, this microsensor will help in finding out the precise locations of enemy submarines, underwater drones and warships at times of and thus, improve our defence. Also, this Vector Hydrophone will help in the submarine communication system, sonobuoys, ROV SONAR, pipeline leakage detection, fish tracking, oceanographic surveys and study of marine life. This paper presents design and optimization of MEMS-based four beams Vector Hydrophone and for this, the worldwide research on the vector hydrophones was referred and later on, the design was optimized using parametric analysis. After the modelling of structure, its simulation was carried out using finite element modeling method via ANSYS software. The receiving sensitivity of this vector hydrophone is -196.73 dB (0dB=1V/?Pa) and was improved upto -184.68 dB by changing the design parameters.

Keywords: MEMS Vector Hydrophone, FEA, Harmonic Response, ANSYS, Piezoresistivity