Design and Development of a Low-Cost Microwave Plasma Reactor for Surface Cleaning Applications

Namit Gupta, Anhad Goel

Abstract: This study presents the design and development of a low-cost microwave plasma reactor for surface cleaning applications using a modified household microwave platform. The system integrates a microwave power source, vacuum-compatible chamber, gas delivery unit, and monitoring subsystem to generate non-thermal plasma under controlled conditions. Plasma formation occurs through electron acceleration and avalanche ionization, producing reactive species capable of removing organic contaminants and modifying material surfaces. The proposed reactor provides an affordable and modular platform for investigating plasma generation, plasma-surface interactions, and plasma-assisted cleaning. The design aims to support education and interdisciplinary research while reducing the cost associated with conventional plasma cleaning technologies.

Keywords: This study presents the design and development of a low-cost microwave plasma reactor for surface cleaning applications using a modified household microwave platform. The system integrates a microwave power source, vacuum-compatible chamber, gas delivery unit, and monitoring subsystem to generate non-thermal plasma under controlled conditions. Plasma formation occurs through electron acceleration and avalanche ionization, producing reactive species capable of removing organic contaminants and modifying material surfaces. The proposed reactor provides an affordable and modular platform for investigating plasma generation, plasma-surface interactions, and plasma-assisted cleaning. The design aims to support education and interdisciplinary research while reducing the cost associated with conventional plasma cleaning technologies.